Aisin Cryopump(冷泵/低温泵）

Aisin''s cryopumpsconsist of a separate compressor unit and a GM refrigerator which has an improved valve mechanism.日本爱信低温泵系统包括两个独立分开的压缩机和GM原理制冷机。High Productivity 高效High Productivity has been achieved by developing a high-output refrigerator with a long regeneration cycle, high throughput operation, and reduced cool-down time.通过研发出来的高效制冷机，实现了高效：很长的再生周期，高产量，较短的降温时间。Simple Maintenance维护简便Maintenance has been simplified. Valves do not require adjustment. In addition to valves, some components do n