铃木Suzuki Shokan Cryopump低温泵（冷泵）

Founded in 1905, Suzuki Shokan has specialized in high pressure gases and related equipment and in 1970, entered into the cryogenics industry field with the development of helium gas applications. The first such project for Suzuki Shokan was to maintain a space communications base. In the beginning days of the semiconductor industry, the company had been a recognized leader known as Suzuki Shokan Cryopumps for the technology we had developed. For ten years the company concentrated on performing